X-ray silicon planar refractive optics

Planar parabolic lens structures are designed for hard X-ray micro- and nano-focusing, beam-shaping, and wavefront diagnostic. The structures are manufactured using the process involving optical or electron beam lithography and deep etching into the silicon. They represent sets of single compound refractive lenses, bi-lens, and multilens systems. There are four configurations of the structures implemented on individual silicon chips and optimized for the X-ray energy from 10 to 50 keV.

Bi-lens Chip consists of ten single compound refractive lenses (L1 – L10) and five bi-lens interferometers (B1 – B5). Each compound refractive lens has a different number N of biconcave parabolic elements with the physical aperture A of 50 µm. The curvature radius R in the apexes of the parabolic refractive surfaces is 6.25 µm. The web size d between biconcave refractive elements is 2 µm. The bi-lens interferometer represents two parallel compound refractive lenses, transversally separated by a distance b equal to 60 µm.

Bi-lens Chip L1 L2 L3 L4 L5 L6 L7 L8 L9 L10 B1 B2 B3 B4 B5
Number of lenses N 6 14 26 40 58 80 104 132 162 196 6 26 58 104 162
Lens length l, um 614 1430 2654 4082 5918 8162 10610 13466 16526 19994 614 2654 5918 10610 16526

Six-lens Chip consists of five single compound refractive lenses (L1 – L5), five bi-lens interferometers (B1 – B5), and five six-lens interferometers (S1 – S5). The physical aperture A of the lenses is 30 µm, curvature radius R is 3.75 µm and web size d is 2 µm. The bi-lens and six-lens interferometers have specially developed chess designs, in which adjacent compound refractive lenses are displaced relative to each other by half of its biconcave parabolic elements to achieve zero space between them.

Six-lens Chip L1 L2 L3 L4 L5 B1 B2 B3 B4 B5 S1 S2 S3 S4 S5
Number of lenses N 10 39 87 156 243 10 39 87 156 243 10 39 87 156 243
Lens length l, um 622 2420 5396 9674 15068 652 2450 5426 9704 15098 652 2450 5426 9704 15098

Triacanta Chip consists of five single compound refractive lenses (L1 – L5), five bi-lens interferometers (B1 – B5), and five 30-lens interferometers (T1 – T5). The structural parameters of the lens systems are the same as the Six-lens Chip.

Triacanta Chip L1 L2 L3 L4 L5 B1 B2 B3 B4 B5 T1 T2 T3 T4 T5
Number of lenses N 10 39 87 156 243 10 39 87 156 243 10 39 87 156 243
Lens length l, um 622 2420 5396 9674 15068 652 2450 5426 9704 15098 652 2450 5426 9704 15098

Centuma Chip consists of five single compound refractive lenses (L1 – L5), five bi-lens interferometers (B1 – B5), and five 100-lens interferometers (C1 – C5). The physical aperture A of the lenses is 10 µm, curvature radius R is 1.25 µm and web size d is 2 µm. The interferometers have chess designs.

Centuma Chip L1 L2 L3 L4 L5 B1 B2 B3 B4 B5 C1 C2 C3 C4 C5
Number of lenses N 3 13 29 52 81 3 13 29 52 81 3 13 29 52 81
Lens length l, um 68 288 640 1146 1784 68 288 640 1146 1784 68 288 640 1146 1784

Papers

  • Snigirev, A., Snigireva, I., Kohn, V., Yunkin, V., Kuznetsov, S., Grigoriev, M.B., Roth, T., Vaughan, G., & Detlefs, C. (2009). X-ray nanointerferometer based on si refractive bilenses. Physical review letters, 103(6), 064801.
  • Zverev, D., Snigireva, I., Kohn, V., Kuznetsov, S., Yunkin, V., & Snigirev, A. (2020). X-ray phase-sensitive imaging using a bilens interferometer based on refractive optics. Optics Express, 28(15), 21856-21868.
  • Snigirev, A., Snigireva, I., Lyubomirskiy, M., Kohn, V., Yunkin, V., & Kuznetsov, S. (2014). X-ray multilens interferometer based on Si refractive lenses. Optics express, 22(21), 25842-25852.
  • Lyubomirskiy, M., Snigireva, I., Kohn, V., Kuznetsov, S., Yunkin, V., Vaughan, G., & Snigirev, A. (2016). 30-Lens interferometer for high-energy X-rays. Journal of synchrotron radiation, 23(5), 1104-1109.
  • Zverev, D., Snigireva, I., Sorokovikov, M., Yunkin, V., Kuznetsov, S., & Snigirev, A. (2021). Coherent X-ray beam expander based on a multilens interferometer. Optics Express, 29(22), 35038-35053.
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