An X-ray optical device is based on two orthogonally placed silicon chips with planar compound refractive lenses (CRLs) focusing the beam successively in the horizontal and vertical planes.
The two CRLs are arranged along the optical axis in such a way, that the focal planes of the lenses coincide. A two-coordinate system of slits is installed in front of the vertical focusing system, to limit the beam that illuminates the CRLs. Astigmatism is corrected by moving the vertical focusing system with a linear motorized stage.
The positions of the different optical elements along the optical axis could be adjusted for different energies of x-rays with a linear positioning precision of ≤ 1 μm and an angular positioning recision of ≤ 0.2°. The proposed design allows the achievement of micro- and nano-focusing of the X-ray beam without any astigmatism and the whole system can be easily integrated into the optical scheme of any research station.